Surface Science
Scanning Probe Microscopy
X-Ray Diffraction
Nuclear Magnetic Resonance
Thin Film
Optical Characterisation
Electrical/Magnetic Characterisation
Thermal Analysis
Sample Preparation-General
Sample Preparation-Electron_Microscopy
Element Analysis
Nano Fabrication
Liquid Helium Plant
Scanning Electron Microscopy-SEM
Transmission Electron Microscopy-TEM
E-beam for oxide
Model:
IVS EB-500
Status:
Maintenance
Location:
2145
Description:
Dedicated to oxide thin film deposition • Wafer numbers / Sizes: 6 pcs / 4" • Film thickness uniformity control under ±5% • Evaporation materials available: Al, SiO2, Al2O3
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