Nuclear Magnetic Resonance
Spin Coater and Hot Plate
Model:
FotoFab
Status:
Operational
Location:
2145
Description:
For spinning coating photoresist and baking processes. Hot Plate: 20 to 250oC heating with precise control. Spin Coater: • Speed Range: 0 to 6,000 rpm • Speed Time : 0 to 999 sec • Substrate Size : > 10 mm2 to 4" square