AJA ORION 8 -Sputtering System
Description:
Sputter Sources: Seven 2” confocal magnetron sputter sources and one direct deposition source.Argon (Ar), Oxygen (O2), Nitrogen (N2) Metal targets: Au, Pt, Nb, Ta, Fe, Ni and etcDielectric targets: TaN, TiW, TiN, SiO2, Si3N4, Al2O3, ITO.