Nuclear Magnetic Resonance
E-beam Evaporation System-Peva
Model:
Peva-450E (Yachtron)
Status:
Maintenance
Location:
2145
Description:
Dedicated to metal thin film deposition • Wafer numbers / Sizes: 6 pcs / 4" • Film thickness uniformity control under ±5% • Evaporation materials available: Au, Ni, Ti, Cr, Y and Nb